Linear stage
Aerotech ANT130XY two-axis nanopositioning stage
Two-axis XY stage with ironless direct-drive linear motors, travels of 60 to 160 mm per axis, 350 mm/s, bidirectional repeatability of +/-75 nm and resolution down to 0.5 nm.
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Key specifications
| Stroke (max) | 160 mm |
|---|---|
| Linear speed (max) | 350 mm/s |
| Repeatability | 0 mm |
| Axes | 2 |
| Resolution (finest) | 0.5 nm |
| Accuracy | +/-2.5 to +/-5.0 um base; down to +/-200 nm with plus/ultra grades |
| Payload (max) | 12 kg |
Summarised in our own words from Aerotech, Inc.'s published data; series maxima, individual models vary. Last checked 2026-10-30. Source 1
Specify Motion is not affiliated with Aerotech, Inc.. Aerotech and ANT130XY two-axis nanopositioning stage are used only to identify the product. Comparisons use published figures; always confirm against the current datasheet.
Aerotech ANT130XY two-axis nanopositioning stage replacement and alternative options
Use these supply-network options as a starting point for an engineering check. We can also help source the original Aerotech part. Published series figures do not establish an exact-model or drop-in replacement: confirm ratings, fit, interfaces and approvals for your application.
Twin profile-rail screw stage listed in the Tolomatic overview brochure; appears to be the predecessor of the TRS family.
| Published maximum | ANT130XY two-axis nanopositioning stage | TKS Dual Profile Rail Bearing |
|---|---|---|
| Force | — | 14,501 N |
| Stroke | 160 mm | 2,438 mm meets or exceeds |
| Speed | 350 mm/s | 1,016 mm/s meets or exceeds |
Screw-driven rodless stage on twin profile rails with a wide, flat carrier, built for heavy, high-moment loads in machine tools, gantries and XYZ systems.
| Published maximum | ANT130XY two-axis nanopositioning stage | TRS Twin Profile Rail Stage |
|---|---|---|
| Force | — | 12,590 N |
| Stroke | 160 mm | 2,200 mm meets or exceeds |
| Speed | 350 mm/s | 1,270 mm/s meets or exceeds |
Compact C7 ballscrew linear module with built-in guide, matched to 100-400 W servo motors from the main Japanese and Taiwanese brands.
| Published maximum | ANT130XY two-axis nanopositioning stage | BLM Built-in Linear Module |
|---|---|---|
| Stroke | 160 mm | 1,250 mm meets or exceeds |
| Speed | 350 mm/s | 1,600 mm/s meets or exceeds |
Figures are the highest published for each series and are not always measured the same way. A higher figure is not automatically a better choice: mounting, duty cycle, feedback, connectors and approvals matter too. An engineer will check the fit against your application before recommending anything.
Typical applications
What a linear stage is
A linear stage is a precision positioning axis in which a carriage or table moves along precision guides, driven by a ball screw, lead screw, belt or linear motor. Compared with a general rodless actuator, a stage emphasises straightness, flatness, accuracy and repeatability, with careful control of pitch, yaw and roll. Stages commonly integrate limit sensors, home sensors and linear or rotary encoders, and they can be stacked into XY, XYZ or gantry systems.
When engineers choose a linear stage
Choose a linear stage when the application depends on positioning accuracy and smooth guided motion, such as inspection, metrology, laser processing, semiconductor and laboratory automation. The trade-offs are cost and payload: precision guides and feedback add cost, and stage precision depends on mounting surface flatness. For general automation where a tenth of a millimetre is enough, a standard rodless actuator is usually more economical.
How to specify the Aerotech ANT130XY two-axis nanopositioning stage
Send these with your enquiry and an engineer can confirm the right ANT130XY two-axis nanopositioning stage variant or an equivalent:
- Travel (mm)
- Accuracy, repeatability and resolution (µm)
- Straightness and flatness of travel (µm)
- Payload and moment loads (kg, Nm)
- Speed and settling time (mm/s, ms)
- Drive type: screw, belt or linear motor
- Encoder type, mounting surface and environment (cleanroom, vacuum)
Common mistakes to avoid
- Mounting a precision stage on a surface that is less flat than the stage
- Confusing repeatability with accuracy
- Ignoring thermal effects from the motor in precision work
- Stacking axes without considering the combined error
Aerotech ANT130XY two-axis nanopositioning stage: frequently asked questions
Can you help replace Aerotech ANT130XY two-axis nanopositioning stage or source the original?
Send the full model code, quantity and required date. Our engineers can check original-part availability and assess suitable alternatives, including Motion Control Products options where appropriate. We confirm compatibility and any changes needed before recommending a replacement.
What is the Aerotech ANT130XY two-axis nanopositioning stage?
Two-axis XY stage with ironless direct-drive linear motors, travels of 60 to 160 mm per axis, 350 mm/s, bidirectional repeatability of +/-75 nm and resolution down to 0.5 nm. Published series figures include stroke 160 mm, linear speed 350 mm/s, repeatability 0 mm, axes 2. It is made by Aerotech, Inc.; Specify Motion can help source it or propose an equivalent.
Who makes the Aerotech ANT130XY two-axis nanopositioning stage?
The Aerotech ANT130XY two-axis nanopositioning stage is made by Aerotech (Aerotech, Inc.) and is listed here for engineers comparing options. Specify Motion is not affiliated with Aerotech, Inc.; brand names are used only to identify the product.
What is the stroke of the Aerotech ANT130XY two-axis nanopositioning stage?
The published series maximum stroke is 160 mm. Individual models and sizes in the ANT130XY two-axis nanopositioning stage range vary, so check the exact variant against your duty cycle, mounting and environment, or ask our engineers to confirm the right size for you.
Is there an alternative to the Aerotech ANT130XY two-axis nanopositioning stage?
We can assess suitable replacement options. On published figures, Tolomatic TKS Dual Profile Rail Bearing and Tolomatic TRS Twin Profile Rail Stage are options to assess from our supply network. An engineer confirms the fit against your application before recommending anything.
What is the difference between accuracy and repeatability on a linear stage?
Repeatability is how closely the stage returns to the same position, while accuracy is how close it moves to the commanded position. A stage can be very repeatable but not accurate if the screw has lead error. Accuracy can be improved with linear encoders or error mapping.
When should a linear stage use a linear motor instead of a screw?
Linear motors suit high speed, high acceleration and smooth motion with no backlash or wear, especially on long strokes. Screw-driven stages suit higher static force, vertical axes and lower cost. Linear motor stages need a linear encoder and careful thermal design, so they are typically more expensive.
Further reading: How to select a linear stage · How to select a linear motor · Linear actuators
Other linear stage series
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